MicroChemicals Wafer Stock List (Revised: 16.05.2012)

Other wafer types on request: info@microchemicals.eu

2 Inch Wafer

Qual.	Material	Size (inch)	Orien- tation	Polished	Thick- ness (μm)	Doping	Resistivity (ohm cm)	Coating	# available now¹/soon²	Article Number (click for request)
Prime	CZ-Si	2	(100)	double-side	279 ± 20	Boron	1 - 10		0 / 450	WSA20279200B1314SNN1
Prime	CZ-Si	2	(100)	one-side	279 ± 20	Boron	1 - 20		0 / 250	WSD20279200B1324SNN1

3 Inch Wafer

Qual.	Material	Size (inch)	Orien- tation	Polished	Thick- ness (μm)	Doping	Resistivity (ohm cm)	Coating	# available now¹/soon²	Article Number (click for request)
Prime	CZ-Si	3	(100)	double-side	381 ± 25	Boron	1 - 20		0 / 100	WSA30381250B1324SNN1
Prime	CZ-Si	3	(100)	one-side	375 ± 25	Boron	1 - 20		49 / 49	WSD3037525XB1324SNN1
Prime	CZ-Si	3	(100)	one-side	380 ± 25	Boron	1 - 20		325 / 325	WSD30380250B1324SNN1
Prime	CZ-Si	3	(111)	one-side	381 ± 25	Boron	1 - 20		0 / 75	WSF30381250B1324SNN1
Dummy³	CZ-Si	3	(111)	one-side	369 ± 37	Phosphor	0.001 - 1000		350 / 350	WSY3036937XP1016SNN1
Prime	Si + SiO₂ (dry)	3	(100)	one-side	380 ± 25	Boron	1 - 20	600 nm	25 / 25	WTD30380250B1324S601

4 Inch Wafer

Qual.	Material	Size (inch)	Orien- tation	Polished	Thick- ness (μm)	Doping	Resistivity (ohm cm)	Coating	# available now¹/soon²	Article Number (click for request)
Prime	Si + Si₃N₄	4	(100)	one-side	525 ± 25	Boron	10 - 20	80 nm	45 / 45	WND40525255B1424S081
Prime	CZ-Si	4	(100)	double-side	525 ± 25	Boron	1 - 20		0 / 50	WSA40525250B1324SNN1
Prime	CZ-Si	4	(100)	double-side	525 ± 25	Boron	8 - 15		100 / 100	WSA40525250B8314SNN1
Prime	CZ-Si	4	(100)	one-side	325 ± 25	Boron	1 - 10		0 / 200	WSD40325250B1314SNN1
Prime	CZ-Si	4	(100)	one-side	500 ± 15	Boron	1 - 3		75 / 75	WSD4050015XB1333SNN1
Prime	CZ-Si	4	(100)	one-side	525 ± 25	Boron	1 - 10		95 / 95	WSD40525250B1314SNN1
Prime	CZ-Si	4	(100)	one-side	525 ± 25	Boron	1 - 10		350 / 350	WSD40525250B1314SNN2
Prime	CZ-Si	4	(100)	one-side	525 ± 25	Boron	0.006 - 0.01		25 / 25	WSD40525250B6011SNN1
Prime	CZ-Si	4	(100)	one-side	525 ± 25	Phosphor	1 - 10		50 / 50	WSD40525250P1314SNN1
Prime	CZ-Si	4	(111)	one-side	525 ± 25	Phosphor	1 - 10		50 / 50	WSF40525250P1314SNN1
Test	CZ-Si	4	(100)	double-side	525 ± 25	Boron	1 - 30		100 / 100	WSJ40525250B1334SNN1
Dummy³	CZ-Si	4	(100)	one-side	525 ± 50	Phosphor	0.001 - 1000		222 / 222	WSV4052550XP1016SNN1
Prime	Si + SiO₂ (dry)	4	(100)	one-side	525 ± 25	Boron	10 - 20	90 nm	46 / 46	WTD40525250B1424S091
Prime	Si + SiO₂ (dry)	4	(100)	one-side	525 ± 25	Boron	10 - 20	280 nm	21 / 21	WTD40525250B1424S281
Prime	Si + SiO₂ (wet)	4	(100)	one-side	525 ± 20	Boron	1 - 20	200 nm	100 / 100	WWD40525200B1324S201
Prime	Si + SiO₂ (wet)	4	(100)	one-side	525 ± 20	Boron	1 - 20	480 nm	75 / 75	WWD40525200B1324S481
Dummy³	Si + SiO₂ (wet)	4	(100)	one-side	525 ± 20	Boron	1 - 20	480 nm	25 / 25	WWV40525200B1324S482

6 Inch Wafer

Qual.	Material	Size (inch)	Orien- tation	Polished	Thick- ness (μm)	Doping	Resistivity (ohm cm)	Coating	# available now¹/soon²	Article Number (click for request)
Prime	CZ-Si	6	(100)	one-side	508 ± 15	Boron	1.65 - 3.85		65 / 65	WSD60508150B1333SNN1
Prime	CZ-Si	6	(100)	one-side	508 ± 15	Boron	12 - 18		100 / 100	WSD60508150B1414SNN1
Prime	Si + SiO₂ (dry)	6	(100)	one-side	675 ± 25	Boron	1 - 20	300 nm	23 / 23	WTD6067525XB1324S301
Prime	Si + SiO₂ (wet)	6	(100)	one-side	675 ± 25	Boron	1 - 20	3000 nm	50 / 50	WWD60675250B1324SXX1

8 Inch Wafer

Qual.	Material	Size (inch)	Orien- tation	Polished	Thick- ness (μm)	Doping	Resistivity (ohm cm)	Coating	# available now¹/soon²	Article Number (click for request)
Prime	CZ-Si	8	(100)	one-side	725 ± 15	Boron	1 - 2		50 / 50	WSD80725150B1323SNN1

¹ available when this list has been revised
² available + ordered (= available in typically few weeks)
³ Wider specified, rather cheap wafers for e. g. resist coating tests or start-up experiments for new litho-processes.

We try to revise this stock list daily or weekly, but we cannot guarantee that it's always up-to-date.

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