AZ Aquatar und AZ Barli-II
AZ Aquatar (TARC) (Datasheet
as PDF)
AZ Barli (BARC) (Datasheet
as PDF)
Antireflective
Coatings (TARCs & BARCs)
AZ Aquatar
(TARC)
AZ® Aquatar® is a top layer anti-reflective coating for
use with g- and i-line. AQUATAR® acts like an optical
coating at the interface photoresist/air and improves
image contrast.
Multiple reflections within the photoresist are also
suppressed, the result is generally a reduction of the
amplitude of the swing curve to 1/3rd. Application is
very simple: it is just spun on top of the photoresist,
no additional bake cycle is required and the standard
development cycle removes it.
This simple process reduces linewidth variation over
topography significantly, however does not suppress
reflective notching.
For further information refer AZ
Aquatar.pdf
AZ Barli (BARC)
AZ® BARLi® - II is a bottom antireflective layer
coating for use on highly reflective surfaces in the
semiconductor industry. It is designed to work with
positive photoresists and is optimized for i-line
exposure tools. Upon completion of the lithographic
process, AZ® BARLi® - II is patterned in a dry-etch
process.
AZ® BARLi® -II coating material is formulated in
photoresist-compatible solvents to simplify the EBR
process and to be both environmental and user friendly.
We recommend AZ® EBR 70/30 for best
performance.
AZ® BARLi® - II is tailor-made to yield the
near-optimum values for refractive indices (n and k) for
i-line lithography, which ensures minimum reflectivity
and maximum swing reduction for photoresist layers.
Composed of highly absorptive polymer-bound dyes,
this material provides excellent coating uniformity and
step coverage.
AZ® BARLi® - II shows high etch selectivity
(comparable
to AZ® BARLi® ) and high thermal stability up to
230°C. It does not show intermixing with photoresist.
AZ® BARLi® - II is available in two thickness
grades, 900 A and 2000 A, in order to provide optimum
film thickness for the first and the second swing
minimum respectively at about 3000 rpm spin speed.
For further information refer AZ
Barli_II.pdf
®AZ, the AZ logo, BARLi , Aquatar and
Kallista are registered trademarks of AZ Electronic
Materials.
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