AZ 4500 Series Photoresists
AZ® 4500-Series:
Thick Resists for Medium Resolution
Film thickness: 2.5 ... 10 μm, up to 100 μm by multiple coating
UV-sensitivity: i-, h-, g-line (310 - 440 nm), broadband or monochromatic
Sales volumes: 250ml, 500ml, 1000ml, 2.5L, and 5L
General Information
Compared to many thin resists, AZ® 4533 and AZ® 4562 have a lower concentration of the photo active compound. The higher transparency allows the exposure of films with 10 μm or more. If a high illumination intensity, a higher film thickness, or rough substrates cause bubbling during exposure despite optimized processing, or a higher aspect ratio is required, the thick resist AZ® 9260 (following chapter) is a recom- mended alternative.
Photoresist AZ 4533 and AZ 4562
AZ® 4533 and AZ® 4562 reflect the standard viscosities to
cover the range from 3 - 10+ µm film thickness.
Development
AZ® 400K 1 : 4 or AZ® 826 MIF recommended
For further information refer Photoresist
AZ 4500-series.pdf
®AZ, the AZ logo, BARLi , Aquatar and
Kallista are registered trademarks of AZ Electronic
Materials.
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